Integrated Vacuum Chamber Case Study
This case study is for a build-to-print project undertaken by Keller Technology to manufacture a complex vacuum chamber and integrate it, along with a frame, pneumatics, and controls for a leading semiconductor equipment manufacturer. The project was performed in close collaboration with a customer’s NPI (New Product Introduction) engineering group. The successful completion of this project highlights our expertise in precision machining, robotic welding, and clean room assembly, integration and test of vacuum chambers for critical semiconductor equipment applications.
Vacuum Chamber for Semiconductor Equipment Manufacturer
Vacuum chambers are essential components in semiconductor manufacturing equipment, playing a crucial role in processes such as deposition, etch and ion implantation. Our company was tasked with machining and robotically welding a series of complex vacuum chambers, performing helium leak test and residual gas analysis (RGA) testing, as well as integrating them into precision welded frames. Additional components, including turbo pumps, vacuum plumbing, and controls, were integrated into the high-level assembly prior shipping to the customer for final system completion.
Client Overview
Our client is a prominent semiconductor equipment manufacturer known for producing advanced and reliable tools used in the fabrication of semiconductor devices. Their goal is to provide high-performance equipment that meets the stringent requirements of the semiconductor industry.
Project Goals and Objectives
The primary goal of the project was to fabricate a complex vacuum chamber that meets the exacting standards required for semiconductor manufacturing equipment. Specific objectives included:
- Achieving the required tolerances through precise machining and robotic welding of the industrial vacuum chamber components.
- Ensuring the vacuum chamber’s integrity through rigorous RGA testing.
- Seamlessly integrating turbo pumps, vacuum plumbing, electronics and controls into the assembly.
- Delivering completed HLAs per our customer’s aggressive timeline
Challenges Faced
The project presented several challenges:
- Technical Challenges: Achieving the necessary precision and repeatability in machining and robotic welding the vacuum chamber components was critical. Ensuring the leak-tight integrity and internal metal surface treatment of the vacuum chamber required meticulous attention to detail.
- Logistical Challenges: Coordinating the delivery of specialized materials and components for a pilot production run, while adhering to tight delivery timelines, required sophisticated planning across several departments.
- Operational Challenges: Maintaining quality control throughout the machining, welding, and assembly process to ensure that each component met the stringent specifications required strict adherence to SOPs and customer specifications.
Solution and Implementation
Our approach to the project included:
- Material Sourcing: Choosing approved suppliers for raw materials and commercial items ensuring they were available in the necessary quantities at the proper intervals.
- Precision Machining: Utilizing advanced, 5-axis CNC machines to machine the vacuum chamber components with exacting tolerances.
- Robotic Welding: Employing state-of-the-art robotic welding techniques to ensure precise and consistent welds, critical for maintaining the vacuum integrity of the chamber.
- Leak Testing: Conducting RGA and helium leak testing to verify the integrity of the vacuum chamber, ensuring it meets all specified standards.
- Clean Room Assembly: Completing the build of the chamber within an ISO 7 clean room and integrating it into a precision welded frame. Additional integration of peripheral equipment and electronics was completed outside the clean room.
- Quality Control: Implementing rigorous testing and inspection protocols at each stage of the process to ensure all components were correctly installed and functional, and in compliance with the client’s specifications. (The use of advanced metrology equipment ensured that all components met the specified tolerances.)
- Advanced Logistics: The large, heavy, and fragile assemblies are hermetically sealed prior to insertion into a custom shipping container. They are shipped within a dedicated, environmentally controlled, air-ride vehicle and can arrive three days early and zero days late.
Client Satisfaction
The project was completed successfully, with the vacuum chamber assembly meeting all performance and quality standards. The client expressed high levels of satisfaction with the project outcome, highlighting the performance and reliability of the assemblies, and the achievement of the ambitious delivery schedule.
Lessons Learned
Key takeaways from this project include:
- The importance of early collaboration and frequent communication with the client to ensure a clear understanding of requirements.
- The need for meticulous planning and coordination, particularly when dealing with specialized materials, tight deadlines, and multi-unit build projects.
- The value of implementing rigorous quality control measures throughout the machining, welding, and assembly process.
Complex Equipment Expertise
For build-to-print solutions for high-complexity assemblies and equipment, contact Keller Technology.